HEATING CRUCIBLE AND DEPOSIT APPARATUS UTILIZING THE SAME

摘要

A heating crucible and a deposit apparatus utilizing the same are provided to eliminate a dim phenomenon during an imaging and a pattern error while forming a deposition pattern on a substrate by preventing an organic compound mass from being deposited on the substrate. In a heating crucible of a deposit apparatus, a main body(310) comprises a space(321) accommodating an organic compound and a nozzle unit(311) through which the evaporated organic compound is discharged. A first inner plate(330) installed in the main body(310) includes a first opening unit through which the evaporated organic compound passes to correspond to the nozzle unit(311). A second inner plate(340) installed on an upper face of the first inner plate inside the main body(310) includes a second opening unit(341) arranged to cross with the first opening unit of the first inner plate(330).