| 摘要 |
PROBLEM TO BE SOLVED: To provide an ESR device for reducing baseline fluctuation resulting from FM modulation mixed into electron spin resonance signal when AFC (Automatic Frequency Control) balance damages. SOLUTION: Direct current bias voltage that is used when the center frequency f<SB>0</SB>of microwave input into a cavity resonator 90 is matched with the resonance frequency fc of the cavity resonator 90 by FM modulation and is an output of a low pass filter 25 is added to direct voltage as an output of the low pass filter 73 by a resonance signal correction means 21. Therefore, the fluctuation of a baseline component resulting from the FM modulation included in the electron spin resonance signal is removed, and the electron spin resonance signal of high reliability is obtained. COPYRIGHT: (C)2007,JPO&INPIT
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