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发明名称
WAFERS TRANSFERRING APPARATUS AND SEMICONDUCTOR PREPARING APPARATUS COMPRISING WAFERS TRANSFERRING APPARATUS
摘要
申请公布号
KR20070041899(A)
申请公布日期
2007.04.20
申请号
KR20050097513
申请日期
2005.10.17
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
PARK, SUNG WOOK;LEE, HEOK JAE;PARK, NO JUNG;PARK, HYU RIM;SEO, KEE WEONE
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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