发明名称
摘要 A near-field optical microscope comprising an optical probe which is arranged in opposition to a sample and irradiates the sample with an evanescent wave, a plurality of photodetectors which detect respective components of light scattered in different directions, among components of the scattered light generated by scattering of the evanescent wave by the sample, and a processor which analyzes characteristics of the sample on the basis of respective detection signals of the plurality of photodetectors.
申请公布号 JP4144819(B2) 申请公布日期 2008.09.03
申请号 JP19980173942 申请日期 1998.06.05
申请人 发明人
分类号 G01N37/00;G02B21/00;G01N21/47;G01Q60/18;G01Q60/22 主分类号 G01N37/00
代理机构 代理人
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