Flow detector device with self check

摘要

A thermal flow sensor is equipped with a self-test unit (20) that monitors the device and generates a fault signal in the presence of a malfunction. The self-test unit (20) can e.g. monitor the integrity of a membrane carrying the heater (4) and temperature sensors (6a, 6b), or it can monitor various operational parameters of the device, thereby increasing the safety of the device.