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发明名称
Anchoring of thin film patterns using lateral oxidation to prevent the dewetting effect
摘要
申请公布号
EP1617470(B1)
申请公布日期
2008.09.03
申请号
EP20050354026
申请日期
2005.07.04
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人
BARBE, JEAN-CHARLES;DREVET, BEATRICE;VINET, MAUD;JAHAN, CARINE
分类号
H01L21/84;H01L21/762;H01L21/78;H01L21/86
主分类号
H01L21/84
代理机构
代理人
主权项
地址
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