| 摘要 |
PROBLEM TO BE SOLVED: To easily, quantitatively and precisely evaluate misalignment by using a simple positioning mark that is easier to form than the comb teeth. SOLUTION: On the either side of positioning object (24), a positioning mark (46) having a pair of edges in a vertical direction to the positioning direction is provided, and on the other side (28) of the positioning object, a pair of light-receiving elements (42a, 42b), (42c, 42d), a part of which are shielded by the edges are provided. COPYRIGHT: (C)2007,JPO&INPIT
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