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发明名称
摘要
申请公布号	JP4142366(B2)	申请公布日期	2008.09.03
申请号	JP20020221923	申请日期	2002.07.30
申请人		发明人
分类号	G01R31/28;G06F17/50;G01R31/3183;G01R31/319;H01L21/82	主分类号	G01R31/28
代理机构		代理人
主权项
地址

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