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发明名称
FILM FORMING DEVICE
摘要
申请公布号
KR100754007(B1)
申请公布日期
2007.09.03
申请号
KR20017010632
申请日期
2001.08.21
申请人
发明人
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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