| 摘要 |
PROBLEM TO BE SOLVED: To improve durability of a diaphragm valve, opening and closing a vacuum guide passage. SOLUTION: In a housing body 2, a negative pressure valve chamber 21 communicated with a negative pressure side opening 9 of a fluid guide passage 8 and an opening 17 of the vacuum guide passage 16 is formed by the housing body 2, and the negative pressure diaphragm 20 is attached for opening and closing the negative pressure side opening 9. The negative pressure diaphragm valve 20 is formed by a valve element part 20a fixed to a negative pressure side actuator 25 in a substantially concentric state with the negative pressure side opening 9, an outer circumference part 20b fixed to the housing body 2, and a diaphragm part 20c provided between the valve element part 20a and the outer circumference part 20b and elastically deforming during opening and closing. A curvature part 20d protruding toward a vacuum guide passage 16 side is formed on th diaphragm part 20c. COPYRIGHT: (C)2007,JPO&INPIT
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