APPARATUS FOR FABRICATING BRAGG GRATING AND METHOD OF FABRICATING BRAGG GRATING USING THE SAME APPARATUS IN PLANAR OPTICAL WAVEGUIDE

摘要

A method and an apparatus for forming a Bragg grating for a planar optical waveguide are provided to form the Bragg grating at accurate positions uniformly by using an automatic exposure controller and an automatic position adjusting unit. An apparatus for forming a Bragg grating for a planar optical waveguide includes a phase mask(304), an exposure controller, and an automatic position adjusting unit. The phase mask forms the Bragg grating. The exposure controller adjusts a UV(Ultra-Violet) beam, which is received on and emitted from the phase mask. The automatic position adjusting unit automatically arranges samples with a planar waveguide configuration and adjusts a position of the exposure controller. The exposure controller includes first and second light blockers(302,305). The automatic position adjusting unit includes X and Y stages(330,308) and a Z stage(320).