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发明名称
Plate manipulation device
摘要
申请公布号
EP1445792(B1)
申请公布日期
2008.09.03
申请号
EP20040001552
申请日期
2004.01.26
申请人
INFINEON TECHNOLOGIES AG
发明人
AIGNER, KURT, DR.;BINDER, ALFRED;MATSCHITSCH, MARTIN;MICHENTHALER, NORBERT;KROUPA, GERHARD;PUCHER, GERHARD
分类号
H01L21/68;H01L21/683
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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