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发明名称
Scanning unit of an optical position measuring device and optical position measuring device
摘要
申请公布号
EP1762827(B1)
申请公布日期
2008.09.03
申请号
EP20060011444
申请日期
2006.06.02
申请人
DR. JOHANNES HEIDENHAIN GMBH
发明人
MARTIN, BARBARA;SCHENK, OLIVER
分类号
G01D5/347;G01D5/26
主分类号
G01D5/347
代理机构
代理人
主权项
地址
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