| 摘要 |
A heat processing furnace and a vertical-type heat processing apparatus are provided to prevent reduction of durability of a heating wire caused by stress in an expanding state of the heating wire. A heat processing furnace includes a processing vessel(3) for receiving and heating a processing target and a cylindrical heater(5) disposed to surround a circumference of the processing vessel. The heater includes a cylindrical heat insulating member(16), a groove-shaped shelf part formed axially in a multi-stage manner on an inner circumference of the heat insulating member, and a heating resistance wire(18) having a helical pattern. The heating resistance wire is positioned along the respective shelf part. Pin members are arranged in the heat insulating member in a constant interval therebetween so that the heating resistance wires are movable in a radial direction of the heater.
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