Manufacturing method for fine structure element, fine structure element manufactured by the method, spatial light modulator, and projector

摘要

Aspects of the invention can provide a manufacturing method for fine structure elements having a first flat portion forming step of forming an upper flat surface serving as a first flat portion on a substrate with a flat cutting tool serving as a cutting section a second flat portion forming step of cutting the upper flat surface serving as the first flat portion by a predetermined depth and forming a lower flat portion serving as a second flat portion with the flat cutting tool serving as the cutting section, a refractive surface forming step of forming a slope serving as a refractive surface having a predetermined angle with respect to the lower flat surface serving as the second flat portion by the flat cutting tool serving as the cutting section.