发明名称 |
Water cooled high precision z-theta stage |
摘要 |
A high precision z-theta stage having a horizontal translation axis (z-axis) and a rotary axis (theta-axis) parallel with the translation axis comprises parallel spaced apart linear translation stages, a carriage supported between the parallel translation stages, and a rotation stage carried by the carriage between the parallel translation stages. Each brushless linear motor is connected to the carriage to apply translation forces in a horizontal plane intersecting the vertical center of gravity. |
申请公布号 |
US7420298(B2) |
申请公布日期 |
2008.09.02 |
申请号 |
US20050169514 |
申请日期 |
2005.06.29 |
申请人 |
AEROTECH, INC. |
发明人 |
BOTOS STEPHEN J.;O'CONNOR BRIAN P. |
分类号 |
B23K26/00;A61F2/00;A61F2/06;A61F2/90;B23Q1/01;B23Q1/26;B23Q1/48;B23Q3/00;B23Q5/00;B23Q5/22;B23Q5/28;B23Q7/00 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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