APPARATUS FOR TREATING SUBSTRATE

摘要

A substrate processing apparatus is provided to prevent damage of a substrate by removing interference with barrier ribs and supporting stably the substrate. A process chamber(102) performs operations for processing a substrate(10). A substrate transfer unit transfers the substrate in a horizontal direction within the process chamber. A barrier rib(104) is formed to divide the process chamber into a plurality of process spaces(102a,102b). The substrate penetrates an entrance(104a) of the barrier rib. A plurality of supporting units(130) are arranged adjacently to the barrier rib to support the substrate. Each of the supporting unit includes a cylinder, cylinder rod, and a sliding member. The cylinder is disposed in the process chamber and includes an internal space. The cylinder rod is disposed in an internal space of the cylinder. The sliding member is coupled with an upper part of the cylinder rod and comes in contact with a bottom surface of the substrate.