| 摘要 |
The invention relates to a thin film (10) consisting of at least two layers (S1, S2, S3) of a ceramic material, a ceramic and metallic material, or in the case of several layers (S1, S2, S3) a metallic material. All layers (S1, S2, S3) of the thin film (10) have a maximum average particle size (K) of approximately 500 nm and at least two layers consist of different material. In at least one of said layers, an essentially stable average particle size (K) remains after a relaxation time (t), even in an increased temperature range (T). The mechanical stability is preferably reinforced by a supporting, essentially flat substrate (12). In the composite element (13), the thickness (ds) of the substrate (12) is at least five times and in particular between ten and a hundred times the thickness dD of the thin film (10). The composite element (13) can be successfully used in a miniaturised electrochemical device, in particular in a solid oxide fuel cell SOFC (18), a sensor (36) or as a gas separation membrane (17). |
