SUBSTRATE SUPPORT FRAME, AND SUBSTRATE PROCESSING APPARATUS COMPRISING THE SAME, AND METHOD OF LOADING AND UNLOADING SUBSTRATE USING THE SAME

摘要

A substrate support frame, a substrate processing apparatus comprising the same, and a method for loading and unloading a substrate using the same are provided to prevent loss due to a breakdown of a lift pin by loading or unloading the substrate without using the lift pin. A substrate loading plate(120) is elevated in a chamber(110). A substrate support frame is installed at an upper part of the substrate loading plate to load and unload a substrate. A body(131) includes an opening corresponding to an upper surface of the substrate loading plate. An edge of the substrate is supported by the body. A robot gate is formed at one side of the body to be connected with the opening. A substrate transfer robot is moved through the robot gate. An edge loading part(132) is formed at an inner circumference of the opening of the body. The edge of the substrate is supported by the edge loading part.