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发明名称
具有控制晶胚分布的矽晶圆及其制备方法
摘要
一种用于制造矽晶圆之方法,包含产生与稳定晶胚之步骤,该晶胚在半导体装置制程中藉由连续热退火而变成氧凝聚物。在矽晶圆中,大致上移除裸露区中的晶胚,且晶胚系以相当高之浓度分布在本体层中。再者,藉由控制晶胚之行为而以高可靠度与再现性形成具有所欲之氧凝聚物浓度曲线的矽晶圆,该氧凝聚物系由连续热退火所形成。
申请公布号
TW200836267
申请公布日期
2008.09.01
申请号
TW096150604
申请日期
2007.12.27
申请人
西尔川股份有限公司;海尼克斯半导体股份有限公司
发明人
朴炯国;洪镇均;金建;高艇槿
分类号
H01L21/324(2006.01);C30B15/00(2006.01)
主分类号
H01L21/324(2006.01)
代理机构
代理人
蔡坤财;李世章
主权项
地址
韩国
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