CONTACT COMBUSTION MODE GAS SENSOR FORM MICROMACHINE

摘要

A MEMS(Micro-Electro-Mechanical System) type contact combustion mode gas sensor is provided to improve performance by organizing more than two detection devices and more than two compensation devices in the form of a Wheatstone bridge. A MEMS type contact combustion mode gas sensor(1) includes a number of detection devices(10) and a number of compensation devices(20). The detection device includes a board, a contact combustion plate, and a heater. The board has a groove formed in the center thereof. The contact combustion plate is formed at a predetermined height above the groove. The heater is formed beneath the contact combustion plate and is inserted in the groove. The compensation devices are organized in the same configuration as the detection devices. The detection devices and the compensation devices are symmetrically arranged to be organized in the form of a Wheatstone bridge.