| 摘要 |
This invention provides a circuit board apparatus for wafer inspection, which is low in production cost and has high connection reliability, a probe card comprising the circuit board apparatus for wafer inspection, and a wafer inspection apparatus. The circuit board apparatus for wafer inspection comprises a substrate body and a connector device provided on the substrate body and comprising a plurality of connector units stacked on top of each other. The connector unit comprises a first anisotropic electroconductive elastomer sheet, a composite electroconductive sheet, a second anisotropic electroconductive elastomer sheet, and a pitch conversion board. The composite electroconductive sheet comprises an insulating sheet with a plurality of through-holes formed therein and rigid conductors disposed in the through-holes in the insulating sheet so as to be protruded from each of both sides of the insulating sheet. The rigid conductor comprises a body inserted into the through-hole in the insulating sheet and a terminal part, with a larger diameter than the diameter of the through-hole in the insulating sheet, provided at both ends of the body. The conductor is movable in the thickness-wise direction in the insulating sheet.
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