| 摘要 |
PROBLEM TO BE SOLVED: To measure efficiently and with high accuracy the amount of eccentricity on a surface to be measured, by accurately separating only a reflected image from the surface to be measured in a lens system to be measured, without having to add image separation lens systems to an eccentricity measuring device. SOLUTION: The eccentricity measuring device comprises a light source 1; a collimating lens 2; an objective lens 5 for making parallel luminous fluxes from the collimating lens 2 condense on the surface to be measured, in the lens system 7 to be measured; a television camera 13 for detecting the position of the reflected image of the light source 1; an observation optical system 12 for forming the image reflected from the surface to be measured on a light-receiving surface in the television camera 13; and a personal computer 17 for calculating the amount of eccentricity in the lens system 7 to be measured, by measuring the deflection of the position of the center of gravity or the center of the reflected image formed. The interval between a conjugate position by the collimating lens 2 of the light source 1 and the objective lens 5, and a conjugate position of the television camera 13 by the observation optical system 12 is set so as to be variable. COPYRIGHT: (C)2008,JPO&INPIT
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