| 摘要 |
A drying apparatus is provided to supply isopropyl alcohol of an optimum atmosphere state by heating isopropyl alcohol after the isopropyl alcohol is injected in a particulate state. A processed article is received in a dry chamber. A flowable dry agent is supplied to the dry chamber by a supply line connected to the dry chamber. A heating unit(60) includes a heating chamber(62) formed on the supply line, an injection nozzle(67) installed in the heating chamber wherein the injection nozzle injects the drying agent of a particulate state supplied by the supply line, and a heater(64) installed in the heating chamber wherein the heater heats the drying agent injected by the injection nozzle. The heating unit can include an extension pipe(66) extended from the inlet of the heating chamber to the inside of the heating chamber, and the injection nozzle can be formed in the extension pipe.
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