| 摘要 |
In a calibration process, a first specimen becoming a standard is filled with air, and then a pressure variation value B1 in the first specimen at a point in time when a predetermined time has elapsed after the first specimen is fully filled with air and a pressure variation value B2 at a point in time when the same time has further elapsed thereafter are measured respectively and stored. In an inspection process, a second specimen as a leakage inspection object is filled with air, pressure variation values B1' and B2', corresponding to the pressure variation values B1 and B2, after a point in time when the second specimen is fully filled with air, are measured, and then a waveform ratio K is operated from these measurements as; K=(B1'-B2')/(B1-B2). Fault in the leakage inspector is judged using the value of the waveform ratio K.
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