| 摘要 |
A filament lamp and a light illumination type thermal processing apparatus are provided to obtain stable performance by preventing non-uniformity of irradiance distribution and thermal processing of an object to be processed. In a long arc tube(11) with a sealed unit at one end, a plurality of filament bodies, each of which is composed of a coil-shaped filament(21E) and a lead(22A-22D) connected to the filament to supply power, are sequentially installed along an axis of the arc tube. The leads of the filament bodies are electrically connected to a plurality of conductive members installed in the sealed unit respectively. Each of the filaments independently receives power. In a cross section perpendicular to the axis of the arc tube, one filament is located in a region(EA1) surrounded by two perpendicular tangents(TA,TB) and a wall of the arc tube, and all the leads related to other filaments except the one filament are located in a region except the region where the one filament is located.
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