SUBSTRATE SURFACE PROCESSING METHOD, SUBSTRATE CLEANING METHOD AND MEDIUM FOR RECORDING PROGRAM,申请号KR20060017330-传众专利搜索

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发明名称	SUBSTRATE SURFACE PROCESSING METHOD, SUBSTRATE CLEANING METHOD AND MEDIUM FOR RECORDING PROGRAM
摘要
申请公布号	KR100832164(B1)	申请公布日期	2008.05.23
申请号	KR20060017330	申请日期	2006.02.22
申请人		发明人
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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