| 发明名称 |
A MOLDED ROTATABLE BASE FOR A POROUS PAD |
| 摘要 |
A rotatable base for a porous pad has openings that provide for improved flow distribution of a liquid in the base across a substrate. The rotatable base can be molded from a two piece mold and the openings can have draft angles to facilitate the molding process. |
| 申请公布号 |
EP1960129(A2) |
申请公布日期 |
2008.08.27 |
| 申请号 |
EP20060838201 |
申请日期 |
2006.11.21 |
| 申请人 |
ENTEGRIS, INC. |
发明人 |
WARGO, CHRISTOPHER;LEBLANC, THOMAS |
| 分类号 |
B08B11/00;B08B1/00;B29C33/00;B29C33/44;B29C49/00 |
主分类号 |
B08B11/00 |
| 代理机构 |
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代理人 |
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