LASER REPAIR SYSTEM

摘要

A laser repair system is provided to secure a laser repair process margin, shorten process time, and minimize the probability of failure by easily adjusting the power distribution of laser beams according to the conditions of a laser repair process. A laser repair system comprises a laser beam oscillator(100) and a slit unit(300). The laser beam oscillator generates laser beams. The slit unit, to which laser beams are applied, comprises a laser beam blocking part, the first slit part, and the second slit part. The laser beam blocking part doesn't permeate the laser beams applied from the laser beam oscillator. The amount of laser beams permeated through the first slit part is larger than the amount of laser beams permeated through the second slit part. The second slit part is formed along the girth of the first slit part.