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发明名称
摘要
申请公布号
JP4141307(B2)
申请公布日期
2008.08.27
申请号
JP20030101232
申请日期
2003.04.04
申请人
发明人
分类号
H01L27/08;H01L29/786;H01L21/20;H01L21/336;H01L21/8234;H01L27/06
主分类号
H01L27/08
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