MANUFACTURING METHOD FERROELECTRIC CAPACITOR

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a ferroelectric capacitor further improving crystal orientation properties in a ferroelectric film. SOLUTION: The manufacturing method allows a ferroelectric capacitor 3 to be manufactured. The ferroelectric capacitor 3 has: the ferroelectric film 13; and a lower electrode 12 and an upper electrode 14 for clamping the ferroelectric film 13. A process for forming the ferroelectric film 13 comprises: a process for forming a first ferroelectric layer 13a of a crystal phase on the lower electrode 12 by an organic metal chemical vapor deposition method; a process for forming a second ferroelectric layer of an amorphous phase on the first ferroelectric layer 13a; a process for crystallizing the second ferroelectric layer of an amorphous phase; and a process for forming a third ferroelectric layer 13c of a crystal phase on the second crystallized ferroelectric layer 13b by the organic metal chemical vapor deposition method. COPYRIGHT: (C)2008,JPO&INPIT