| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared reflector which is not easily deteriorated when film growth and a heating treatment are performed in an atmosphere containing oxygen, nor absorbs a large amount of infrared light, and also to provide the heating device including the reflector. SOLUTION: A dielectric film 2, an Au (gold) film 3, and an oxide film 4 are successively formed on a base material 1. The infrared reflector with the above configuration is used by allowing the oxide film 4 to face a body to be heated. The infrared light from a heating source is reflected against reflection metal being the Au film 3 and collected on the side of the body to be heated. The dielectric film 2 is formed on the base material 1, thereby preventing the diffusion of Au under high temperature and the deterioration of the infrared reflector. COPYRIGHT: (C)2008,JPO&INPIT
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