| 摘要 |
In a scribing apparatus, an irradiated portion is irradiated with a laser beam having an irradiation energy distribution which is Gaussian distribution, and in the case where a line along which a material is divided is a center axis, the above described irradiation energy distribution has two peak portions which are at a distance from each other over a width W with the above described center axis at the center, and the irradiation energy between the two peak portions is zero. |
