| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment device capable of oxidatively decomposing a sublimate generated at performing heat treatment on a treated object without depending on a temperature of air circulated in a heat treatment portion. SOLUTION: This heat treatment device 10 comprises a heat insulating furnace 11 composed of the heat treatment portion 20 for performing the heat treatment on a treated object W, and an air conditioning portion 30 for heating and circulating air, the heat insulating furnace 11 has a photocatalyst means 31 capable of decomposing the sublimate generated at performing the heat treatment on the treated object W, and the photocatalyst means 31 is disposed in a position to which light is applied and which is kept into contact with the air circulated in the heat insulating furnace 11. COPYRIGHT: (C)2009,JPO&INPIT
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