GAS SENSOR AND MANUFACTUTRING METHOD THEREOF

摘要

A gas sensor and manufacturing method thereof is provided to hold a sensitive film effectively by forming an adhesive layer on top of an insulation layer, and then forming a sensitivity film and a sensitivity electrode pattern on top of adhesive layer. A gas sensor comprises a substrate(100), a membrane(110) formed on the top of the substrate; a heating electrode pattern(120) formed on top of the membrane; an insulating layer(130) which is formed on the top of the membrane while wrapping the heating electrode pattern; an adhesive layer(160) formed on top of a sensing electrode pattern(140) formed on the top of the adhesive layer; Some part of the membrane region is exposed due to removal of some part of the lower part of the substrate.