METHOD FOR MANUFACTURING A AISNAL LINE, THIN FILM TRANSISTOR ARRAY PANEL AND METHOD FOR MANUFACTURING THE SAME

摘要

A method for manufacturing signal lines, a TFT(Thin Film Transistor) array substrate, and a method for manufacturing the same are provided to shorten a manufacturing time and reduce a manufacturing cost by forming data lines, a semiconductor layer, and an ohmic contact layer all together or a passivation film and pixel electrodes all together using a single mask. In a method for manufacturing signal lines, a lower film containing one or more metal layers is formed. An upper film containing cooper is formed at the upper part of the lower film. A photoresist pattern is formed at the upper part of the upper film. Using the photoresist pattern as an etching mask, the upper film is selectively performed by wet etching. Using the photoresist pattern as an etching mask, dry etching is performed for the lower film. An etchant used for wet etching contains ethylene glycol, sulfuric acid, nitric acid, and pure water.