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发明名称
VERY LONG CYLINDRICAL SPUTTERING TARGET AND METHOD FOR MANUFACTURING
摘要
申请公布号
EP1960565(A2)
申请公布日期
2008.08.27
申请号
EP20060804278
申请日期
2006.10.02
申请人
THERMAL CONDUCTIVE BONDING, INC.
发明人
SIMPSON, WAYNE, R.;SCATENA, RYAN A.;STEVENSON, THOMAS R.;GUERRERO, JAIME F.
分类号
C23C14/32;C23C14/00
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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