| 摘要 |
A transfer module of an ion implantation apparatus is provided to reduce the time taken for pre-aligning by configuring a plurality of pre-aligners in the transfer module, and having transfer arms of a transfer robot as many as the pre-aligners. A transfer module of an ion implantation apparatus comprises a load port(10), a transfer robot(70), a pre-aligner(80), a load shuttle(40), a loadlock(50), and an unload shuttle(60). A pod(P) with a plurality of wafers is mounted on the load port. The transfer robot has more than two transfer arms to move more than two wafers. The pre-aligner receives the wafer from the transfer robot. The load shuttle loads the wafers. The loadlock has a cassette(52) receiving the wafers from the load shuttle, supplies the wafers to a process chamber(100), and receives the wafers processed in the process chamber. The unload shuttle unloads the wafers from the cassette of the loadlock, and loads the unloaded wafers therein.
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