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发明名称
摘要
申请公布号
JP4142130(B2)
申请公布日期
2008.08.27
申请号
JP19970158519
申请日期
1997.06.16
申请人
发明人
分类号
C23C14/30;H01J37/30;H01J37/305
主分类号
C23C14/30
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