High temperature sensor and test method therefor

摘要

The sensor has a temperature-dependent measuring resistor arranged on a terminal pad (4) that has a nano-layer (2) made of aluminum trioxide. Connections of the measuring resistor are connected in parallel connection with an insulation resistor of the terminal pad. A capacitive resistor is connected with an evaluation unit by outer connection lines (6.1, 6.2). A monitoring circuit monitors changes of the insulation resistor. An independent claim is also included for a method for monitoring a high temperature sensor.