ТОНКОПЛЕНОЧНЫЙ МАТЕРИАЛ И СПОСОБ ЕГО ИЗГОТОВЛЕНИЯ

摘要

A thin film material and a method of manufacturing the thin film material are obtained with which properties of films formed on a substrate can be improved. A superconducting wire 1 includes a substrate 2, an intermediate thin film layer (intermediate layer 3 ) formed on the substrate and comprised of one layer or at least two layers, and a single-crystal thin film layer (superconducting layer 4 ) formed on the intermediate thin film layer (intermediate layer 3 ). An upper surface (ground surface 10 ) that is the upper surface of at least one layer of the intermediate thin film layer (intermediate layer 3 ) and is opposite to the single-crystal thin film layer (superconducting layer 4 ) is ground.