| 发明名称 |
Ozonated water flow and concentration control apparatus and method |
| 摘要 |
A method for mixing fluids for process tools comprises: receiving a first fluid having a first flow and a first concentration to be supplied to a first process tool; receiving a second fluid having a second flow and second concentration; and mixing the first and the second fluid to produce a third fluid having a third flow and third concentration to be supplied to a second process tool. |
| 申请公布号 |
EP1962165(A1) |
申请公布日期 |
2008.08.27 |
| 申请号 |
EP20080009291 |
申请日期 |
2003.04.25 |
| 申请人 |
MKS INSTRUMENTS, INC. |
发明人 |
FITTKAU, JENS;SEIWERT, JOHANNES;GOTTSCHALK, CHRISTINE |
| 分类号 |
G05D21/02;B01F1/00;C01B13/00;C01B13/10;C02F1/78;G05D21/00;H01L21/02;H01L21/304 |
主分类号 |
G05D21/02 |
| 代理机构 |
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