发明名称
摘要 An apparatus and method is provided for recognizing a working position of a device transfer system in a semiconductor device test handler. The working position of a transfer unit of the handler is adjusted based on tray and change kit positions to allow components to be quickly and precisely loaded and transferred when various kinds of semiconductor devices are tested in the handler. A laser sensor which detects a color change of an object is provided with the transfer unit, and scans corners of the tray and change kits to acquire position information related to the tray and change kits. The working position of the transfer unit is calculated using basic handler information contained in the control unit of the handler and the acquired information.
申请公布号 JP4141820(B2) 申请公布日期 2008.08.27
申请号 JP20020358351 申请日期 2002.12.10
申请人 发明人
分类号 G01R31/26;G01R1/073;H01L21/00;H01L21/677;H01L21/68 主分类号 G01R31/26
代理机构 代理人
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