发明名称 Method for structuring a flat substrate consisting of a glass-type material
摘要 Disclosed is a method for structuring a flat substrate consisting of a glass-type material. The invented method is distinguished by a combination of the following steps: providing a semiconductor flat substrate consisting of a semiconductor material, structuring at least one surface of said semiconductor flat substrate to obtain recesses in said surface, connecting said surface of said semiconductor flat substrate to said glass-type flat substrate, with said structured surface of said semiconductor flat substrate being connected to a surface of said glass-type flat surface at least partially covering the same, tempering said connected flat substrates in such a manner that at least a part of the said glass-type material flows into said recesses of said structured surface of said semiconductor flat substrate, removing material at least from the resolidified glass-type flat substrate in such a manner that said glass-type flat substrate assumes a surface which is flush with said structured surface of said semiconductor flat substrate.
申请公布号 US7416961(B2) 申请公布日期 2008.08.26
申请号 US20040471581 申请日期 2004.05.10
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. 发明人 QUENZER HANS-JOACHIM;SCHULZ ARNE VEIT;WAGNER BERND;MERZ PETER
分类号 H01L21/00;H01L23/15;B81C99/00;C03B19/02;C03C27/00;H01L21/20;H01L23/14 主分类号 H01L21/00
代理机构 代理人
主权项
地址