发明名称 Device and approach for integration of optical devices and waveguides therefor
摘要 Optical devices having integrated waveguide and active areas are realized using a crystallization approach involving the inhibition of defects typically associated with liquid-phase crystalline growth of lattice mismatched materials. According to one example embodiment, a growth region is formed such that the region is isolated from a silicon portion of silicon material. The region extends from a silicon-based seeding area of the substrate. A semiconductor material is deposited on a Silicon-based seeding area and in the growth region. A single crystalline material is formed from the deposited semiconductor material by heating and cooling the deposited semiconductor material while directing growth of the semiconductor material from the Silicon-based seeding area and through an opening sufficiently narrow to mitigate crystalline defects. A light-communicating device is formed by etching the silicon material over an insulator layer and etching the single crystalline material.
申请公布号 US7418166(B1) 申请公布日期 2008.08.26
申请号 US20070710624 申请日期 2007.02.23
申请人 THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY 发明人 KAPUR PAWAN;KUO YU-HSUAN;WIEMER MICHAEL WEST;MILLER DAVID A. B.
分类号 G02B6/12;G02B6/10 主分类号 G02B6/12
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