发明名称 |
Device and approach for integration of optical devices and waveguides therefor |
摘要 |
Optical devices having integrated waveguide and active areas are realized using a crystallization approach involving the inhibition of defects typically associated with liquid-phase crystalline growth of lattice mismatched materials. According to one example embodiment, a growth region is formed such that the region is isolated from a silicon portion of silicon material. The region extends from a silicon-based seeding area of the substrate. A semiconductor material is deposited on a Silicon-based seeding area and in the growth region. A single crystalline material is formed from the deposited semiconductor material by heating and cooling the deposited semiconductor material while directing growth of the semiconductor material from the Silicon-based seeding area and through an opening sufficiently narrow to mitigate crystalline defects. A light-communicating device is formed by etching the silicon material over an insulator layer and etching the single crystalline material.
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申请公布号 |
US7418166(B1) |
申请公布日期 |
2008.08.26 |
申请号 |
US20070710624 |
申请日期 |
2007.02.23 |
申请人 |
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY |
发明人 |
KAPUR PAWAN;KUO YU-HSUAN;WIEMER MICHAEL WEST;MILLER DAVID A. B. |
分类号 |
G02B6/12;G02B6/10 |
主分类号 |
G02B6/12 |
代理机构 |
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主权项 |
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地址 |
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