发明名称 METHOD OF MANUFACTURING PATTERN SUBSTRATE
摘要 <p>A method for manufacturing a pattern substrate is provided to eliminate an exposure process, a developing process, and a cleaning process by coating selectively a resist without using a mask. A resist layer is formed by coating resist ink on a region except for a region corresponding to a pattern on a substrate by using an ink-jet method(S110). A pattern layer is laminated on the substrate to cover the resist layer and the region corresponding to the pattern(S130). A pattern is formed by removing the resist layer and the pattern layer laminated on the resist layer(S140). The process for forming the pattern includes a process for removing the resist layer by etching selectively the resist layer.</p>
申请公布号 KR100854514(B1) 申请公布日期 2008.08.26
申请号 KR20070041957 申请日期 2007.04.30
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 LEE, RO WOON;JOUNG, JAE WOO;PARK, SUNG JUN;YUN, KWAN SOO
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
主权项
地址