发明名称 CMOS device with dual polycide gates and method of manufacturing the same
摘要 A CMOS device having dual polycide gates is formed by first providing a silicon substrate, which is divided into a cell area and a peripheral circuit area and has a device isolation layer, a P-well, and a N-well in the peripheral circuit area. The n+ polycide gate at the P-well and the p+ polycide gate at the N-well are formed. An interlayer dielectric layer is formed on the resultant of the silicon substrate having the n+ polycide gate and the p+ polycide gate. A first bit-line contact hole for exposing the n+ polycide gate is formed, and a second bit-line contact hole for exposing the p+ polycide gate is formed. Bit-lines with a bridge structure on the interlayer dielectric layer is formed. The bit-lines simultaneously contact the n+ polycide gate and the p+ polycide gate through the first and second bit-line contact holes.
申请公布号 US7417283(B2) 申请公布日期 2008.08.26
申请号 US20050299501 申请日期 2005.12.12
申请人 HYNIX SEMICONDUCTOR INC. 发明人 CHUN YUN SEOK
分类号 H01L23/62;H01L27/088 主分类号 H01L23/62
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