发明名称 Semiconductor device and method for manufacturing the same
摘要 A semiconductor device is composed of a semiconductor chip, aluminum pads formed on the semiconductor chip, alloy ball bumps, which are formed on the aluminum pads, containing gold and Pd, and gold wires, which are connected to the alloy ball bumps, having a surface made of gold. The alloy ball bumps may be composition containing gold not less than 98 mass % to not more than 99.5 mass % and palladium not less than 0.5 mass % to not more than 2 mass %. The semiconductor device having above configuration is excellent in long-term reliability.
申请公布号 US7417324(B2) 申请公布日期 2008.08.26
申请号 US20050075442 申请日期 2005.03.09
申请人 NEC ELECTRONICS CORPORATION 发明人 OBIYA TOMOCHIKA
分类号 H01L21/60;H01L23/48;H01L23/52 主分类号 H01L21/60
代理机构 代理人
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