发明名称 |
Filter apparatus, exposure apparatus, and device-producing method |
摘要 |
A filter apparatus for improving gas temperature stability while maintaining a high impurity removal capacity. The filter apparatus includes a filter for removing impurities from a gas and a temperature adjuster for adjusting the temperature of the gas to a predetermined temperature. The filter apparatus further includes a humidity detector, arranged at the upstream side of the filter, for adjusting the humidity of the gas before the gas passes through the filter.
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申请公布号 |
US7416574(B2) |
申请公布日期 |
2008.08.26 |
申请号 |
US20050292491 |
申请日期 |
2005.12.02 |
申请人 |
NIKON CORPORATION |
发明人 |
UDAGAWA KENJI;NAGAHASHI YOSHITOMO |
分类号 |
A61G10/00;A61G11/00;A61G13/00;B01D46/00;B01D46/42;G03F7/20 |
主分类号 |
A61G10/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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