Modulation circuit with integrated microelectro-mechanical system (MEMS) components

摘要

A modulation circuit includes a microelectronic electromechanical system (MEMS) based resonant structure having a resonant frequency, an excitation input and an output. A control module is coupled to the excitation input of the MEMS based resonant structure. The control module modifies resonant characteristics of the MEMS based resonant structure to modulate the resonant frequency of the MEMS based resonant structure to produce a modulated signal at the output.